Single Wafer Load Lock Tool
Application Scope and Tool Configuration
- This special Load Lock design is intended for experimental lines or small-scale production lines, featuring a small footprint and low cost.
- It utilizes a dry pump to create vacuum to balance chamber pressure.
- Customizable based on customer requirements, with options for PVD, ALD, Descum, or Plasma Polish chambers. To integrate what kind of the individual chamber is highly customizable.
- Integration with transfer chambers for future mass production.
- Equipped with SECS / GEM for automation.
- Manual single-wafer loading and unloading.
